Nanostructures and Optics with Swiss Precision

XRnanotech is the leading Swiss manufacturer of highest-quality X-ray optics from high-aspect-ratio Fresnel zone plates with record-breaking resolution to ultra-stable diamond optics and custom 3D-nanostructures for a wide range of X-ray applications.

Products

X-ray and EUV Optics

A scanning electron microscope image of a fresnel zone plate optic for diffractive focusing of X-rays.

Fresnel Zone Plates

High aspect ratio with the best achievable resolution.

Fresnel Zone Plates

A scanning electron microscope image of a diffractive grating for beam splitting, interferometry and phase contrast imaging.

Gratings and Beam Splitters

Designed for customer needs using various fabrication approaches.

X-ray Gratings and Beam Splitters

Two electron microscopy images of a condenser lens incorporated into a complete X-ray imaging setup. The left is a full picture and the right is a zoomed in image.

X-ray Microscopy Setups

Complete sets of optical components for full field or scanning X-ray microscopes.

Phase Contrast Imaging

Atomic force microscopy images of blazed gratings.

Blazed Gratings

Superior performance in diverse optical systems having choice grove density and high performance. © Paul Scherrer Institite.

Blazed Gratings and Greyscale Structures

A scanning electron microscope image of a defocusing refractive lens, part of an achromatic X-ray lens system.

Achromatic X-ray Lenses

3D nanoprinting allowing unique nanostructures and X-ray optics.

Achromatic X-ray Lenses

Microscope image of phase rings for an X-ray imaging system.

Phase Imaging Components

Phase rings to generate positive or negative Zernike phase contrast images.

Phase Contrast Imaging

Image of a spiral zone plate design.

Spiral and Custom Zone Plates

Unique beam shaping and focusing applications with resolution excellence.

Custom Design Optics

Electron microscopy image of a multi focus zone plate.

Custom Design Optics

Unique applications at synchrotrons and XFELs.

Custom Design Optics

An electron microscope image of a two dimensional array for waveform sensing.

Hartmann Wavefront Sensor Plates

2D array for wavefront sensing etched deep in Si, Au, W and more.

Hartmann Wavefront Sensor Systems

Resolution Targets and
Test Patterns

Electron microscope image of a calibrated target for testing the resolution of images generated with X-ray or extreme ultraviolet light.

Siemens Star

Resolution testing with feature capability < 10 nm.

Resolution Targets

Electron microscope image of a nested L structure.

Nested “L” structure

Accurate, calibrated and reproducible for your imaging reference purposes.

Micro CT Test Targets

Electron microscope image of a standardized 1951 United States Air Force resolution test chart.

Linear and Grating Resolution Patterns

Measurements, ruling, scaling with linearly spaced Ronchi gratings.

Resolution Targets

Electron microscope image of a standardized 1951 United States Air Force resolution test chart.

1951 USAF Resolution Test Chart

Analysis and validation in images and optical engineering.

Resolution Targets

Photograph taken with a scanning electron microscope of a test target for X-ray micro computed tomography.

Micro Computed Tomography (μCT)

Test patterns with state-of-the-art accuracy.

Micro CT Test Targets

A pattern including all standard resolution targets.

Standardized Test Patterns

Compact 0.3 × 0.3 mm² test target layout with < 50 nm features and < 10 nm compatibility, ideal for very high-resolution X-Ray imaging system calibrations.

Micro CT Test Targets

Scanning electron microscope image of a three dimensional Siemens star for testing resolution.

3D Siemens Star

Accurate and high resolution structures from a variety of materials.

3D Nanostructures

Diamond Optics

A photograph of a diamond beamsplitter grating.

Diamond Beamsplitter

The highest quality and performance under the most intense radiation.

Diamond Optics

Scanning electron microscope image of a zone plate made from diamond.

Diamond Fresnel Zoneplates

Robust and durable focusing solutions at free electron laser beamlines. C. David et al., doi: 10.1038/srep00057

Diamond Optics

Diamond Resolution Test Targets

Indestructible, accurate and prescribed image resolution tests targets from diamond.

Diamond Optics

Electron microscopy image of a checkerboard grating made from diamond.

Custom Diamond Gratings

Large grating area on diamond plates with < 100 nm feature size and ∼10 μm height. Photo by T. Mamyrbayev, Paul Scherrer Institute.

Diamond Optics

Electron microscope image of a custom diffuser made of diamond for X-rays.

Diamond Custom Structures

Innovative nanofabrication solutions designed for high radiation heat loads.

Diamond Optics

Membranes and
Beamline Supplies

Image of thin membranes mounted on silicon chips.

Standard Membranes

Practical multi-frame arrays that can be cleaved easily into individual membranes.

Membranes

Photograph of silicon nitride membranes with customized membrane shapes.

Custom Membranes for Liquid Cells

Low stress standard and customized membranes and through ports on wafers for applications in photonics, X-ray sampling, nanoscale research and microfluidics.

Membranes

Photograph of silicon nitride windows in a wafer.

Coated Membranes

Expert application for vast coating materials and thicknesses with nanometer resolution.

Membranes

Photograph of silicon nitride windows in a wafer.

Membrane Wafers

High quality with low prices for a variety of wafer sizes.

Membranes

Photo of a central stop.

Central Stops

We supply the critical components of beamline design with many materials and dimensions.

Beamline Supplies, Apertures and Central Stops

Scanning electron microscope image of an array of pin holes.

Pinholes and Order Sorting Apertures

Single or array of holes and aperture elements for X-ray beam shaping and image clarity.

Beamline Supplies, Apertures and Central Stops

Scanning electron microscope image of thin silicon nanowires.

Nanowires

Ultra-thin nanowires with various sizes and positions for innovative applications.

Beamline Supplies, Apertures and Central Stops

Scanning electron microscope image of a beam shaper.

Diffusers and Beam Shapers

Fabricated to give broad and uniform illumination for cleaner X-ray imaging.

Beamline Supplies, Apertures and Central Stops

Photonics Solutions

Laser Scanning Confocal Microscopy image of an array of micrometer sized lenses all adjacent to each other.

Microlenses

High accuracy lens pitch and position for any pattern and application.

Nanophotonics and Foundry Services

Image of grayscale laser lithography.

Greyscale Fabrication

High sensitivity grayscale laser lithography.

Blazed Gratings and Greyscale Structures

Scanning electron microscope image of a grating.

Gratings

Excellence in grating fabrication and design using direct laser writing or photolithography masks.

Blazed Gratings and Greyscale Structures

Microscope image of phase rings for an X-ray imaging system.

Nano Silicon on Insulator (SOIs) Resonators

Fast and efficient, ring structure, top-notch, direct-on-chip solutions for photonics integrated circuits.

Nanophotonics and Foundry Services

Photo of a grating lithographically designed.

Nano Silicon on Insulator (SOIs) Grating Couplers

Accurate design and patterning of surface grating teeth for the best fiber coupling efficiency.

Nanophotonics and Foundry Services

A photo of a photonics integrated circuit inspected with a microscope.

Nano Silicon on Insulator (SOIs) Waveguides

Laser writing of integrated photonic circuits in both 2D and 3D.

Nanophotonics and Foundry Services

A photo of a photonic detector chip

Detector Chips

Using lithography, we develop and fabricate detector chips, sensors, and integrated circuits for your specific applications.

Nanophotonics and Foundry Services

A photo of a photonic detector chip with the logos of the two companies, XRnanotech and Swiss PIC.

Manufacturing and Integration

Photonics package solutions for excellent oversight of design and fabrication with our friends at Swiss‑PIC.

Nanophotonics and Foundry Services

Fabrication Services

Image of a silicon wafer being prepared in a cleanroom facility with an array of membranes.

Cleanroom Service

Your custom needs solved with out 1000 m² cleanroom rated up to class 10/ISO 4. State of the art lithography, etching and deposition services.

Nanophotonics and Foundry Services

Photograph of the clean room at Park Innovaare.

Tools

Over 80’000’000 CHF worth of state of the art instrumentation at our fingertips, supplying lithography, etching and deposition services. Photo by M. Teller, Park Innovaare.

Nanophotonics and Foundry Services

Photo of lithographically fabricated rings.

Lithography

Electron Beam Lithography (EBL), Direct Laser Writer (DLW), 2-Photon Polymerization (2PP) for 3D Lithography, Mask Aligner (MA), Displacement Talbot Interference Lithography (DTL).

Nanophotonics and Foundry Services

Scanning electron microscopy image of a grating with step heights.

Etching

Reactive Ion Etcher (RIE), Ion Milling (IM), Inductively Coupled Plasma Reactive Ion Etcher (ICP-RIE), Deep Reactive Ion Etcher (D-RIE), Inductively Coupled Plasma Deep Reactive Ion Etcher (ICP-D-RIE)

Nanophotonics and Foundry Services

Atomic force microscopy image of platform structures.

Plating

In house solution plating with high purity and robustness of materials.

Nanophotonics and Foundry Services

Image of coated gratings on glass

Coating

Plasma Enhanced Atomic Layer Deposition (PE-ALD), Plasma Enchanced Chemical Vapor Deposition (PE-CVD), Physical Vapor Deposition (PVD)

Nanophotonics and Foundry Services

Solutions

The culmination of more than 10 years of research and development in Switzerland, with the goal to bring the newest groundbreaking innovations to the nano optics and technology markets.

Applications and Solution

Detailed attention on customizable designs that work.

Technology

Lithography, laser writing, etching, photolithography and 3D structuring.

Awards

Recognition of excellence evident from numerous grants, awards and investments.

Specialization in Customization

Photograph of the clean room at Park Innovaare used by XRnanotech and the Paul Scherrer Institute.

Are you interested in the possibilities of micro- and nano fabrication, but do not know where to start? Do you need a customized product that is not available anywhere? We are offering consulting and engineering services to provide you with the right solution for your needs. Within our 1000 m² cleanroom with up to class 10/ISO 4, we have an electron beam lithography system, a direct laser writer, a nano 3D printer, several etching systems and deposition tools on site. As your premium partner in nanotechnology, we are well equipped to provide you with your custom-made products.

Photo by M. Teller, Park Innovaare.

Nanophotonics and Foundry Services

Expanding X-ray Optics Solutions with Microworks GmbH

Image of the Microworks GmbH logo, an electron microscope image of a high aspect ratio grating, and a photograph of an X-ray lens system.

Our ability to provide an even broader range of advanced X-ray optics and components is expanding with the company, Microworks. In addition to our high-precision optics, nanostructures, and targets, Microworks brings expertise in innovative X-ray lenses, beamstops, gratings, and interferometers, including their cutting-edge TALINT series. This enhanced product portfolio offers:

  • X-ray lenses designed for superior resolution and contrast across diverse imaging applications.
  • TALINT system technology with new Phase Contrast and Dark-Field Contrast modalities for improved, user-friendly imaging.
  • Advanced X-ray apertures to control beam size and shape with precision.
  • Freestanding column beamstops for effective beam attenuation.
  • Accurate calibration tools and X-ray gratings for diffraction, interferometry, and spectroscopy applications.

Together, we deliver comprehensive solutions tailored to meet the diverse needs of the scientific and industrial communities.

X-ray Lenses

Packaging and Pricing

A scanning electron microscope image of a blazed Fresnel zone plate.

Fresnel Zone Plates

  • Material selection in silicon, diamond, aluminum, gold, iridium, and many more.
  • Patterning as columnar, blazed, beveled, line-doubled, multi-level or customized all with nanometer resolution and choice of diameter.
  • Applications in X-ray focusing, condenser lenses in X-ray or extreme ultraviolet (EUV) optical, synchrotron and free electron laser (FEL) systems.
  • Mounted on transparent membranes with or without a central stop.
  • Pricing as low as 5’000 CHF with discounts on multiple units.
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A scanning electron microscope image of a grating.

Precision Gratings

  • Material selection in Silicon, Diamond, Aluminum, Gold, Iridium, and many more.
  • Patterning as linear, blazed, or custom shaped with selectable pitch, height and orientation.
  • Applications in beam splitting, magneto-optical traps (MOTs), extreme ultraviolet (EUV) optics, spectrometers, monochromators, synchrotron radiation, and free electron lasers (FELs).
  • Mounted on Silicon wafers or transparent membranes.
  • Pricing as low as 6’000 CHF with discounts on multiple units.
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A scanning electron microscope image of resolution test target for X-ray computed tomography.

Test Patterns and Resolution Targets

  • Calibration standards and resolution test targets for micro computed tomography applications.
  • Quality control with a certificate of inspection.
  • Material choices: Au, Ir, Diamond
  • Mounted on a holder inside a secured case.
  • Fast lead time.
  • Pricing as low as 1’500 CHF.
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Photograph of silicon nitride membranes from a wafer.

Membranes

  • Low stress silicon nitride membranes.
  • We are ready-to-ship standard membranes and work with custom tailored membranes.
  • Available in various or customized dimensions to cater to specific project requirements
  • Membrane size from hundreds of nanometers to micrometers.
  • Membranes as thin as 50 - 2000 nm
  • Frame size from 3 to 20 milimeters.
  • Pricing as low as 6.60 CHF per piece
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Photograph of a silicon wafer with nanostrutres investigated under a microscope.

Fabrication Services

  • Solution engineering: We find the right solution to fit your needs.
  • Custom designs: We tailor our product development for your application.
  • End to end project management: Sourcing, manufacturing, quality control and shipping.
  • Experienced and proficient: Trustworthy accurate fabrication with state of the art cleanroom instrumentation
  • Pricing as low as 1’500 CHF
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Featured Products

A scanning electron microscope image of a blazed zone plate.

Nanostructured multilevel gold Fresnel zone plate with a membrane substrate.

Outer most zone width – 50 nm, diameter – 300 μm, optimized for 11 keV, levels at 67 nm and 33 nm.

A scanning electron microscope image of gratings and zone plates made from ruthenium.

Ruthenium μm and nm precision optics.

New ruthenium micrometer and nanometer structures made with Swiss precision, blemish free and multilayered.

A scanning electron microscope image of a resolution test target with feature sizes of 10 nanometers.

Hybrid Ultra-High Resolution X-ray Sample (10 nm)

Resolution test target with the smallest feature size of 10 nm in iridium and 50 nm in gold. Thicknesses are 500 nm and 100 nm.

What Our Customers Say About Us

Colored image of magnetic domains on nanowires that are arranged as a helix.

“I have tested the Cobalt-25 nanometer zone plate you sent and it is very good. For your record, I am sending an image showing the magnetic domains on nanowire arranged as Helixes. The size of the helix is 70 nm and we’ve got very good details, well beyond the resolution of the zone plate. Good job.” – Dr. Rachid Belkhou

HERMES Beamline

Optical microscope image taken by a customer of XRnanotech of a resolution test chart.

“We are pleased with the resolution chart.” – Mr. Petr Cerno - Supply Chain Manager

Photonic Science & Engineering Ltd.

Photo collage of the strategic sales workshop through the Innosuisse scale-up coaching program.

“XRnanotech has great products that highly benefit their customers.” – Dr. Egle B. Thomas

Stratergix GmbH