Electron microscope image of a siemens star, a resolution test sample typical for X-ray images

Products

XRnanotech manufactures the world’s most advanced nanostructures and optics for a wide range of X-ray and extreme ultraviolet applications.

Scanning

Fresnel Zone Plates

Standard, high aspect-ratio and blazed zone plates from an ample choice of materials, manufactured with electron beam lithography

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Electron microscope image of a grating.

X-ray Gratings and Beam Splitters

Diffractive gratings for beam splitting, phase contrast imaging or grating interferometry

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Electron microscope image of a diamond checkerboard grating.

Diamond Optics

Zone plates, gratings and optics made of diamond for high intensity applications, e.g. at free electron lasers

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Electron microscope image of a lens matrix, a type of compound refractive X-ray lens.

X-ray Lenses

Strong refractive power and finely adjustable working distances for compound refractive lenses and prism lenses

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Scanning electron microscope image of an achromatic compound refractive lens.

Achromatic X-ray Lenses

Novel achromatic lens systems allow for a broad usage of X-ray radiation

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Scanning electron microscope image of a spiral zone plate.

Custom Design Optics

Free design of optics for unique applications like beam splitting, focusing or orbital angular momentum

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Electron microscopy image of a resolution test target for micro computed tomography imaging applications.

Micro CT Test Targets

Calibration test targets for micro CT applications

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Electron microscopy image of a customized resolution test pattern for the application of image resolution calibration and targeting.

Resolution Targets

Standard or custom resolution test patterns with state-of-the-art accuracy

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Photograph of lithographically fabricated ring structures.

Phase Contrast Imaging

Full field transmission X-ray microscope optics, set of condensers, zone plates and zernike phase rings

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Side by side images of a scanning electron microscope image of a hartmann wavefront energy plate and a microlens array.

Hartmann Wavefront Sensor Systems

Created with high-Z materials through deep reactive ion etching and grayscale lithography with direct laser writing

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Three dimensional design of a segment from an achromatic lens

3D Nanostructures

Custom 3D-printed structures, e.g. phase corrector plates, kinoform lenses and arrays or resolution test targets

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Photograph of a sensor chip.

Nanophotonics and Foundry Services

Custom photonics and chip fabrication for cutting-edge optical applications

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Photograph of blazed gratings in an array.

Blazed Gratings and Greyscale Structures

Replicable 2.5-D microoptical elements with grayscale resist topography and shape fidelity

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Photograph of custom made membranes supported by a rectangular chip.

Membranes

Membranes supported by frames all with flexible dimensions engineered for optical and industrial use

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Photo of a central stop.

Beamline Supplies, Apertures and Central Stops

Improved performance across EUV and X-ray systems

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