Build your Product
Assemble your next prototype or the new generation of your product from our large selection of micro- and nanolithography process modules. Our experts are waiting to support you and accompany you from the first prototype to upscaling.
Technology Modules
| Typical materials | Applications | Substrate Size |
| UV Lithography | Photoresists, Au, Cr, Si, SiO₂, Glass | Photomasks, Lift-off masks, Microfluidics, MEMS patterning | 200 mm x 200 mm |
| Electron Beam Lithography | PMMA, HSQ, Au, Cr, Si, Glass, Diamond | DOEs, Nanophotonics, High-resolution masks, Quantum devices | 200 mm Wafer |
| Free-Form Grayscale | Photoresists (e.g. AZ, ma-P) | Microlens arrays, Freeform optics, Beam shapers | 200 mm x 200 mm |
| X-Ray LIGA | PMMA, SU-8, mr-X, Au, Ni, NiCo | Microstructures, Gratings, Molds | 100 mm Wafer |
| Reactive Ion Etching | Si, SiO₂, Si₃N₄, Metals | AR/VR, Photonic Devices, Nanoporous Membranes | 200 mm Wafer |
| Deep Reactive Ion Etching | Si | MEMS, Microfluidics, Kinoform optics | 200 mm Wafer |
| Electroplating | Au, Ni, NiCo, Cu,… | Gratings, MEMS, ICs, Mold inserts, High-density metal structures | 200 mm x 200 mm |
| Metal Assisted Chemical Etching | Si | Ultra High Aspect Ratio Nanostructures, Black silicon, Photonic surfaces | 200 mm Wafer |
We will get in touch with you usually until the next business day.