Fresnel Zone Plates

Offering a wide selection of high aspect-ratio, high-resolution and high-focusing efficiency zone plates from an ample choice of materials, manufactured with electron beam lithography, photolithography and X-ray LIGA.

  • High aspect-ratio Fresnel zone plates
  • Best achievable resolution
  • Great efficiency across 50 eV – 20 keV
  • Outstanding material choices (Au, Ni, Si, SiO2, Ir, Ru, Cr, Diamond)
  • Blazed or multi-step designs for optimal focusing efficiency
  • World-record achievable resolution based on the Ir-line-doubling technique
A collection of images of Fresnel zone plates.

Blazed, multi-step and binary written with electron beam lithography electroplated, etched, and coated for multi-keV X-rays with and a wide range of nanostructured sizes down to 7 nm and or a wide as desired.

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Specifications

Outermost Zone
Width Limit		Height
Hard X-ray>25 nm>700 nm
Soft X-ray>10nm>120 nm
EUV> 15nm50 nm
Large Material ChoiceAu, Ir, Pt, Ni, Cr, Ru, Mo, Si, SiN, SiO2, Diamond, PMMA, etc.

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