Micro-Spectrometers
High-precision grating structures fabricated using electron beam lithography and deep X-ray LIGA, combining nanometer-scale accuracy with high-aspect-ratio capabilities. They are ready for direct integration into high-performance optical systems.
Specifications
| Key Component | Vertical Blazed Grating |
| Paramenters | < 0.2µm Pitch with > 350µm Height |
| Optical design and System integration | Insion (GER) and Spectrochip (TW) |
| Applications | Medical Diagnostics, Industrial Process Control, Agriculture and Food, Lab-on-Chip Systems, Security |
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