Resolution Targets
Quality control and machine performance verification devices
- Various standard resolution test patterns
- High contrast material choice: Au, SiO2
- Customizable according to customers’ needs
- NanoXSpot, USAF 1951, Yxlon, Siemens stars
Resolution test patterns are essential for verifying machine performance and ensuring quality control in various imaging systems. We offer many standard types of resolution targets, such as the Yxlon, NanoXSpot and USAF 1951, each designed to cater to different precision needs. These targets come in compact chip sizes and are made with robust silicon substrates and gold absorbers for high durability. With line and space widths ranging from 0.01 to 12 µm, they enable precise calibration of imaging systems. Custom resolution targets are also available, tailored to specific layouts, materials, and critical dimensions. These patterns are particularly valuable for microscopy and imaging in the X-ray to EUV light range, delivering highly accurate investigation and calibration for advanced optical systems.
Specifications
| Smallest Features / nm | Area, A / mm2 | |
| typical | 50 | 1 |
| standard limit | 10 | 3 |
| Aspect Ratio | |
| typical | 10 ∶ 1 |
| standard limit | > 30 ∶ 1 |
| Standard Targets |
| Critical Feature Size / nm | Height / μm |
| 100 | 1 |
| 200 | 1.5 |
| 300 | 4 |
| 400 | 4 |
Prices per piece with volume discounts applicable.
We will get in touch with you usually until the next business day.