Resolution Targets

Quality control and machine performance verification devices

Various standard resolution test patterns
High contrast material choice: Au, SiO2

Customizable according to customers’ needs
NanoXSpot, USAF 1951, Yxlon, Siemens stars

We offer a broad portfolio of standard resolution targets, including YXLON, NanoXSpot, and USAF 1951, covering a wide range of precision requirements. Our capabilities extend to fully customized designs – from Siemens stars to nested-L patterns – tailored for advanced imaging and metrology applications.

Specifications

	Smallest Features / nm	Height	Aspect Ratio
Ultra-high Resolution	10 nm	0.2 µm	20 : 1


High Resolution	50 nm	0.8 µm	16 : 1


Microscopy Target	100 nm	1 µm	10 : 1


Micro-CT Target	200 nm	1.5 µm	7.5 : 1


Calibration Target	300 nm	4 µm	13 : 1


Calibration target	400nm	4 µm	10 : 1

Prices per piece with volume discounts applicable.

We will get in touch with you usually until the next business day.