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Description
- Different standard resolution test patterns
- Material choices: Au, SiO2
- Customizable according to customers’ needs
Example
USAF 1951 test target in nm
Siemens stars
50 nm Lines and spaces
Specifications
smallest features
typical
50 nm
limit
15 nm
Area
typical
1 mm²
limit
3 mm²
Aspect ratio
typical
10
limit
> 30
Resolution test samples
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