Resolution test samples

Description

- Different standard resolution test patterns

- Material choices: Au, SiO2

- Customizable according to customers’ needs

Example

USAF 1951 test target in nm

Siemens stars

50 nm Lines and spaces

Specifications

smallest features

typical

50 nm

limit

15 nm

Area

typical

1 mm²

limit

3 mm²

Aspect ratio

typical

10

limit

> 30

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