Description

- Different standard resolution test patterns

- Material choices: Au, SiO2

- Customizable according to customers’ needs

Example

USAF 1951 nanometer scale test target
Siemens star resolution test target nanometer scale
Custom made resolution test target

USAF 1951 test target in nm

Siemens stars

50 nm Lines and spaces

Specifications

smallest features

typical

50 nm

limit

15 nm

Area

typical

1 mm²

limit

3 mm²

Aspect ratio

typical

10

limit

> 30

Resolution test samples