Ultra-high resolution zone plates

Description

- Ultra-high aspect ratio Fresnel zone plates

- World-record achievable resolution

- Based on the Ir-line-doubling technique

- Material: Ir

Example

Line doubled iridium fresnel zone plate

FIB cross-section of 25 nm wide, 550 nm high Ir

Fresnel zone plate metrics

World-record resolution: 7nm

Specifications

∆Rn [nm]

typical

25 - 50

limit

< 10

D [µm]

typical

100 - 250

limit

> 2.500

N

typical

1.000 - 3.000

limit

> 30.000

Aspect Ratio

typical

20

limit

> 30

Publications

B. Rösner et al. Exploiting atomic layer deposition for fabricating sub-10 nm X-ray lenses Microelectronic Engineering 191 (2018) p. 91

B. Rösner et al. 7 nm spatial resolution in soft x-ray microscopy Microscopy and Microanalysis 24 (2018) p. 270

K. Jefimovs et al. A zone doubling technique to produce ultra-high resolution x-ray optics Physical Review Letters 99 (2007) p. 264801

J. Vila-Comamala et al. Advanced Thin Film Technology for Ultrahigh Resolution X-Ray Microscopy Ultramicroscopy 109 (2009) p. 1360